Why does the pressure sensor work fine under positive pressure but exhibit instability and non-linear increases under negative pressure?

The silicon cup of the gauge pressure sensor experiences anisotropic corrosion, which leads to inconsistent stress directions under positive and negative pressure, resulting in nonlinear asymmetry and increased nonlinearity. At the same time, when under positive pressure, the core is in a suspended state and is not affected by external stress, leading to a more stable output. However, when in a negative pressure state, the suspended state of the core is disrupted, and stress is applied to the diaphragm of the sensor core, making it appear unstable. The solution is to carry out detailed design and processing inside the sensor housing to avoid stress interference under negative pressure.

Is it normal for the core output to be greater than 200mV?

Which is better, the closed-loop 4-wire or the open-loop 5-wire for the core?

Is it normal for the core output to be greater than 200mV?

Which is better, the closed-loop 4-wire or the open-loop 5-wire for the core?

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Why does the pressure sensor work fine under positive pressure but exhibit instability and non-linear increases under negative pressure?

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